The AcuDep300 is an advance particle deposition system used to deposit polystyrene latex spheres onto wafers, reticules and computer disks in order to create light scatter standards that can be used to calibrate particle scanners used to inspect those surfaces.

PSL spheres can be purchased in NIST Traceable diameters. The diameter distribution of these spheres is further narrowed by filtering within AcuDep so that particle depositions of known diameter and count can be created.

AcuDep was used to develop and check existing written SEMI Standards for these calibration standards and is the only particle deposition system that has been shown to do so.

TSW uses an AcuDep300 to create particle depositions as an industry service. The system was developed at TSW by Craig Scheer and is now sold by Craig at TSW Corp. , located in Grand Forks, North Dakota.

Craig may be contacted for more information by visiting: TSWCorp.com.
TSW Corp. is completely independent of TSW.